Detection of Volatile Organic Compounds by Using MEMS Sensors

Abstract

We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a closely related interferent. Toward that end, we investigate the sensitivity and selectivity of two detector polymers—polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA)—to both gases. A semiautomatic method is developed to functionalize individual sensors and sensor arrays with the detector polymers. We found that the sensor array can selectively sense 1 ppm of formaldehyde in the presence of benzene.

Keywords

• electrostatic
• bifurcation
• MEMS
• VOCs