Theory and application of robust linear phase-shift algorithm for phase-shift deflectometry method

Abstract

Abstract Based on the polynomial theory, the error propagation characteristics of the widely used N-step discrete Fourier transform (N-DFT) phase-shift algorithm were analyzed via theoretical analysis, under the effect of Gamma distortion and phase detuning. The results showed that the N-DFT algorithm could not simultaneously suppress both types of error. A robust linear phase-shift (RLPS) algorithm was designed, the performance of the RLPS and 8-DFT algorithms in terms of spectral response, detuning robustness, and $${G}_{S/N}$$ G S / N was briefly analysis by Manuel Servin method. The Simulation analysis and comparison of the results show that the RLPS algorithm could suppress both types of error simultaneously, which exhibited better stability and accuracy than N-DFT and exponential algorithms, particularly in gradient measurement stability, peak-to-valley (PV) and root-mean-square (RMS) error suppression. Moreover, a physical experiment apparatus was built to test unidirectionally inclined plane mirror and concave mirror using the RLPS, N-DFT, and exponential algorithms. The results showed that the RLPS algorithm could significantly improve the measurement stability and accuracy in the presence of detuning and without screen Gamma calibration.

Keywords

• Phase-shift deflectometry
• Gamma distortion
• Detuning error
• Phase shift algorithm