Development of MEMS-in-TEM Setup to Observe Shear Deformation for the Study of Nano-Scale Friction

Abstract

Observing the atomic-level deformation of a frictional interface in real-time is important step to elucidate the mechanism of lubrication. We have combined the nano-scale handling capabilities of MEMS technology with the unsurpassed observation ability of TEM and developed a MEMS-in-TEM experimental setup. Our MEMS device had Ag tips with two degree-of-freedom controlled by electrostatic actuators. Opposing tips were brought into contact using the actuator. After forming a contact, one tip was actuated laterally but slowly enough to maintain the contact between the tips. We succeeded in observing the nano-scale deformation of Ag junction in real time.

Keywords

• shear deformation
• ag
• tem observation
• mems