Method for Selecting the Functioning Modes of the Carriage Drive of Probe Equipment during Transient Processes Providing Minimization of Probing Cycle Duration. Part 1. Method for Studying Mechanical Oscillations of the Object Stage Drive

Abstract

The article presents the results of the analysis of preliminary studies of mechanical vibrations with a natural frequency of the object stage of the probe equipment. They made it possible to establish that the duration of their attenuation, until the completion of which the crystals’ validity cannot be controlled, significantly depends on the mode of motion dynamics during acceleration and braking. At the same time their duration is up to ~87 % of time of the probing cycle and under certain modes of drive operation, it has a minimum that allows, without the use of active vibration damping systems, to reduce the duration of the vibration damping process by 25–36 % with a corresponding increase in the productivity of the probing process. It is shown that the range of variation of the step of the object stage displacement from the standpoint of its influence on the damping time of mechanical vibrations can conditionally be divided into two ranges: 1) displacement with a step of less than 2–3.5 mm, the most promising from the standpoint of a stably existing trend of minimizing the size of crystals, at which the damping time of oscillations is significant and depends nonlinearly on the value of this step, and 2) displacement with a step of more than 2–3.5 mm, for which the damping time of oscillations does not practically depend on the displacement step. Algorithm of further studies is proposed that makes it possible, after their implementation, to develop a method for choosing rational modes of operation of the probe equipment carriage drive during transient processes that ensure minimization of the duration of the probing cycle.

Keywords

• probe equipment
• method
• microelectronics
• transient processes
• performance