Large remnant polarization and great reliability characteristics in W/HZO/W ferroelectric capacitors

• Shiva Asapu,
• James Nicolas Pagaduan,
• Ye Zhuo,
• Taehwan Moon,
• Rivu Midya,
• Dawei Gao,
• Jungmin Lee,
• Qing Wu,
• Mark Barnell,
• Sabyasachi Ganguli,
• Reika Katsumata,
• Yong Chen,
• Qiangfei Xia,
• J. Joshua Yang,
• J. Joshua Yang

Affiliations

Shiva Asapu

Department of Electrical and Computer Engineering, University of Massachusetts, Amherst, MA, United States

James Nicolas Pagaduan

Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA, United States

Ye Zhuo

Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, CA, United States

Taehwan Moon

Samsung Advanced Institute of Technology, Gyeonggi-do, South Korea

Rivu Midya

Department of Electrical and Computer Engineering, University of Massachusetts, Amherst, MA, United States

Dawei Gao

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, Los Angeles, CA, United States

Jungmin Lee

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, Los Angeles, CA, United States

Qing Wu

Air Force Research Laboratory, Information Directorate, Rome, NY, United States

Mark Barnell

Air Force Research Laboratory, Information Directorate, Rome, NY, United States

Sabyasachi Ganguli

Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright - Patterson Air Force Base, Dayton, OH, United States

Reika Katsumata

Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA, United States

Yong Chen

Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, Los Angeles, CA, United States

Qiangfei Xia

Department of Electrical and Computer Engineering, University of Massachusetts, Amherst, MA, United States

J. Joshua Yang

Department of Electrical and Computer Engineering, University of Massachusetts, Amherst, MA, United States

J. Joshua Yang

Department of Electrical and Computer Engineering, University of Southern California, Los Angeles, CA, United States