Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

Zhuoyue Zheng; Chen Wang; Linlin Wang; Zeyu Ji; Xiaoxiao Song; Pui-In Mak; Huafeng Liu; Yuan Wang

doi:10.3390/mi15030352

Micromachines (Feb 2024)

Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications

Zhuoyue Zheng,
Chen Wang,
Linlin Wang,
Zeyu Ji,
Xiaoxiao Song,
Pui-In Mak,
Huafeng Liu,
Yuan Wang

Affiliations

Zhuoyue Zheng: Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Chen Wang: Department of Electrical Engineering-MNS, University of Leuven, 3000 Leuven, Belgium
Linlin Wang: Department of Electrical Engineering-MNS, University of Leuven, 3000 Leuven, Belgium
Zeyu Ji: Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Xiaoxiao Song: School of Physics and Information Engineering, Jiangsu Second Normal University, Nanjing 210013, China
Pui-In Mak: Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Huafeng Liu: MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
Yuan Wang: Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China

DOI: https://doi.org/10.3390/mi15030352
Journal volume & issue: Vol. 15, no. 3
p. 352

Abstract

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The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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