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ACS Omega
(Aug 2023)
Initial Optimization of the Growth Conditions of GaAs Homo-Epitaxial Layers after Cleaning and Restarting the Molecular Beam Epitaxy Reactor
Dawid Jarosz,
Marcin Stachowicz,
Piotr Krzeminski,
Marta Ruszala,
Anna Jus,
Pawel Sliz,
Dariusz Ploch,
Michal Marchewka
Affiliations
Dawid Jarosz
International Research Centre MagTop, Institute of Physics, Polish Academy of Sciences, Warsaw, Poland
Marcin Stachowicz
Institute of Physics, Polish Academy of Sciences, Warsaw, Poland
Piotr Krzeminski
Center of Microelectronics and Nanotechnology, University of Rzeszow, Institute of Materials Science and Engineering, Rzeszow, Poland
Marta Ruszala
Center of Microelectronics and Nanotechnology, University of Rzeszow, Institute of Materials Science and Engineering, Rzeszow, Poland
Anna Jus
Center of Microelectronics and Nanotechnology, University of Rzeszow, Institute of Materials Science and Engineering, Rzeszow, Poland
Pawel Sliz
Center of Microelectronics and Nanotechnology, University of Rzeszow, Institute of Materials Science and Engineering, Rzeszow, Poland
Dariusz Ploch
Center of Microelectronics and Nanotechnology, University of Rzeszow, Institute of Materials Science and Engineering, Rzeszow, Poland
Michal Marchewka
Center of Microelectronics and Nanotechnology, University of Rzeszow, Institute of Materials Science and Engineering, Rzeszow, Poland
DOI
https://doi.org/10.1021/acsomega.3c04777
Journal volume & issue
Vol. 8, no. 36
pp. 32998 – 33005
Abstract
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No abstracts available.
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