MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS

Abstract

This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of ~400 °C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature.

Keywords

• microheater
• copper oxide
• gas sensors
• glass substrate
• semiconductors