Gas-Flow Sensor Based on Self-Oscillating and Self-Sensing Cantilever

Jens-Peter Zöllner; Steve Durstewitz; Jaqueline Stauffenberg; Tzvetan Ivanov; Mathias Holz; Waleed Ehrhardt; W.-Ulrich Riegel; Ivo W. Rangelow

doi:10.3390/proceedings2130846

Proceedings (Dec 2018)

Gas-Flow Sensor Based on Self-Oscillating and Self-Sensing Cantilever

Jens-Peter Zöllner,
Steve Durstewitz,
Jaqueline Stauffenberg,
Tzvetan Ivanov,
Mathias Holz,
Waleed Ehrhardt,
W.-Ulrich Riegel,
Ivo W. Rangelow

Affiliations

Jens-Peter Zöllner: Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Steve Durstewitz: Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Jaqueline Stauffenberg: Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Tzvetan Ivanov: Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Mathias Holz: Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Waleed Ehrhardt: Electronic & Sensors, Am Vogelherd 10 (Tor 1), 98693 Ilmenau, Germany
W.-Ulrich Riegel: ETG Entwicklungs-und Technologie Gesellschaft mbH, Am Eichicht 1 A, 98693 Ilmenau, Germany
Ivo W. Rangelow: Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany

DOI: https://doi.org/10.3390/proceedings2130846
Journal volume & issue: Vol. 2, no. 13
p. 846

Abstract

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In this work the application of a self-sensing and self-actuating cantilever for gas-flow measurement is investigated. The cantilever placed in the flow is excited permanently at its first resonance mode. Simultaneously the resonance amplitude, the resonance frequency and the static bending of the cantilever are detected. All three sizes are related to the velocity of the gas-flow.

Published in Proceedings

ISSN: 2504-3900 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: General Works
Website: http://www.mdpi.com/journal/proceedings

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