Wall Shear Stress Calorimetric Micro-Sensor Designed for Flow Separation Detection and Active Flow Control

Abstract

This paper presents an efficient and high-sensitive micro-sensor designed for wall shear stress measurement. The main technical application targeted is flow separation detection for closed-loop active flow control. The sensor is a temperature-resistance transducer operating on heat transfer. The device is micro-structured with three substrate-free wires presenting a high aspect ratio, and periodic perpendicular micro-bridges ensuring mechanical toughness and thermal insulation. This design achieves a homogeneous temperature distribution along the wires. Welded on a flexible printed circuit, the sensor is wall-mounted on a wind tunnel. The experiments, conducted in both attached and separated flow configurations, demonstrate the sensor sensitivity to wall shear stress up to 2.4 Pa and the ability of the 3-wires based design to perform flow direction sensing for back-flow detection.

Keywords

• MEMS sensors
• wall shear stress sensors
• calorimetric sensors
• flow control
• separation detection