Investigation of Boron Distribution at the SiO2/Si Interface of Monolayer Doping

• Shu-Han Hsu,
• Chia-Chen Wan,
• Ta-Chun Cho,
• Yao-Jen Lee

Affiliations

Shu-Han Hsu

Sirindhorn International Institute of Technology (SIIT), Thammasat University, Pathum Thani, Thailand

Chia-Chen Wan

Department of Electronics Engineering, National Chiao-Tung University, Hsinchu, Taiwan

Ta-Chun Cho

Taiwan Semiconductor Research Institute, Hsinchu, Taiwan

Yao-Jen Lee

Taiwan Semiconductor Research Institute, Hsinchu, Taiwan