High-speed, large-area and high-precision fabrication of aspheric micro-lens array based on 12-bit direct laser writing lithography

Abstract

Aspheric micro-lens array (AMLA), featured with low dispersion and diffraction-limited imaging quality, plays an important role in advanced optical imaging. Ideally, the fabrication of commercially applicable AMLAs should feature low cost, high precision, large area and high speed. However, these criteria have been achieved only partially with conventional fabrication process. Herein, we demonstrate the fabrication and characterization of AMLAs based on 12-bit direct laser writing lithography, which exhibits a high fabrication speed, large area, perfect lens shape control via a three-dimensional optical proximity correction and average surface roughness lower than 6 nm. In particular, the AMLAs can be flexibly designed with customized filling factor and arbitrary off-axis operation for each single micro-lens, and the proposed pattern transfer approach with polydimethylsiloxane (PDMS) suggests a low-cost way for mass manufacturing. An auto-stereoscopic-display flexible thin film with excellent display effect has been prepared by using above technology, which exhibits a new way to provide flexible auto-stereoscopic-display at low cost. In brief, the demonstrated fabrication of AMLAs based on direct laser writing lithography reduce the complexity of AMLA fabrication while significantly increasing their performance, suggesting a new route for high-quality three-dimentional optical manufacturing towards simplified fabrication process, high precision and large scale.

Keywords

• aspheric micro-lens array
• large-area fabrication
• sub 6 nm roughness
• 12-bit direct laser writing lithography