Ultrafast 3D nanofabrication via digital holography

Wenqi Ouyang; Xiayi Xu; Wanping Lu; Ni Zhao; Fei Han; Shih-Chi Chen

doi:10.1038/s41467-023-37163-y

Nature Communications (Mar 2023)

Ultrafast 3D nanofabrication via digital holography

Wenqi Ouyang,
Xiayi Xu,
Wanping Lu,
Ni Zhao,
Fei Han,
Shih-Chi Chen

Affiliations

Wenqi Ouyang: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Xiayi Xu: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Wanping Lu: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Ni Zhao: Department of Electronic Engineering, The Chinese University of Hong Kong
Fei Han: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong
Shih-Chi Chen: Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong

DOI: https://doi.org/10.1038/s41467-023-37163-y
Journal volume & issue: Vol. 14, no. 1
pp. 1 – 9

Abstract

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The application of two-photon lithography has been limited by the low writing speed. The authors reported a multi-focus improved lithography platform that employs up to 2000 laser foci to perform parallel fabrication with 90 nm resolution via optimised polymerisation and single-pulse printing strategy.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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