SnO2 thin film parameter influence on gas sensitive characteristics

Abstract

In this report we present results of investigation of influence of the parameters of SnO2 thin film on their gas sensitive properties. SnO2 films were deposited by spray pyrolysis method. The influence of technologic parameters on concentration of free electrons n, stoichiometry, thickness d and gas sensitivity S=Rgas/Rair was investigated by means of electrophysical, IR-spectroscopy and SIMS measurements. It was established that optimal spray solution s composition is 0.2M, which allows depositing of SnO2 films with required parameters: n-1018 -1019 cm-3, R=105 -106 and S>10 correspondently. Obtained results on gas sensitivity are compared with results of theoretical considerations.