Fabrication of Highly Sensitive Porous Polydimethylsiloxane Pressure Sensor Through Control of Rheological Properties

Abstract

In order to enhance the sensitivity of elastomers, pores were integrated into their structure. These pores facilitate the adjustment of thickness in response to external pressure variations, thereby improving the sensitivity of pressure sensors. Pores were introduced by emulsifying immiscible polydimethylsiloxane (PDMS) and water with a surfactant. By controlling the water content in the PDMS and water emulsion, we controlled the size, density, uniformity, and spatial distribution (2D or 3D) of the pores within the PDMS matrix. The presence of these pores significantly improved the sensitivity of PDMS under low external pressure conditions compared to high pressures. Specifically, porous PDMS exhibited approximately 10-times greater sensitivity under low-pressure conditions than non-porous PDMS. The effectiveness of porous PDMS was demonstrated through dynamic loading and unloading detection of a small Lego toy and monitoring of human heartbeats. These results highlight the efficacy of our pressure sensor based on porous PDMS, which is fabricated through a simple and cost-effective process using a PDMS and water emulsion. This approach is highly suitable for developing the ability to detect applied pressures or contact forces.

Keywords

• capacitive sensors
• porous PDMS
• bubbly PDMS
• PDMS foam