Design and Simulation Elements of Analytical Microsystem-on-Chip With the Structures "Silicon-on-Insulator"

Abstract

In this paper the results of architecture development, layout designof analytical microsystem-on-chip with the structures "silicon-on-insulator" (SOI) and its elements schemotechnical computer simulation for determine their electrical and time characteristics are presented. Keywords: analytical microsystem-on-chip, silicon-on-insulator structure, gate array, ring oscillator.