Reflectance mapping with microsphere-assisted white light interference nanoscopy

Abstract

Abstract The characterisation of novel materials presents a challenge that requires new and original developments. To face some of these demands for making measurements at the nanoscale, a new microsphere-assisted white light interference nanoscope performing local reflectance mapping is presented. This technique presents the advantages of being non-destructive, full-field and label-free. A 145 μm diameter microsphere, glued to the end of an optical fiber, is inserted inside the white light interference microscope to improve the lateral resolution from 940 nm to 520 nm. The acquisition and the Fourier transform processing of a stack of interference images superimposed on the virtual image produced by the microsphere allows the extraction of the local reflectance over a wavelength range of 460 nm to 900 nm and a field of view of 8 μm in diameter. The enhancement in the lateral resolution of the reflectance is demonstrated through the spectral distinction of neighboring ripples on a laser-textured colored stainless-steel sample that cannot be resolved without the microsphere, on regions with a surface of 279 × 279 nm2 horizontally spaced 279 nm apart. Future improvements could potentially lead to a lateral resolution of reflectance measurement over a 100 nm diameter area in air, paving the way to sub-diffraction reflectance mapping.

Keywords

• Microsphere
• Nanoscopy
• Resolution
• White Light Interference Microscopy
• Local Spectroscopy
• Reflectance