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ACS Omega
(Feb 2024)
Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films
Elisa Atosuo,
Mikko J. Heikkilä,
Johanna Majlund,
Leevi Pesonen,
Miia Mäntymäki,
Kenichiro Mizohata,
Markku Leskelä,
Mikko Ritala
Affiliations
Elisa Atosuo
Department of Chemistry, University of Helsinki, Helsinki, Finland
Mikko J. Heikkilä
Department of Chemistry, University of Helsinki, Helsinki, Finland
Johanna Majlund
Department of Chemistry, University of Helsinki, Helsinki, Finland
Leevi Pesonen
Department of Chemistry, University of Helsinki, Helsinki, Finland
Miia Mäntymäki
Department of Chemistry, University of Helsinki, Helsinki, Finland
Kenichiro Mizohata
Department of Physics, University of Helsinki, Helsinki, Finland
Markku Leskelä
Department of Chemistry, University of Helsinki, Helsinki, Finland
Mikko Ritala
Department of Chemistry, University of Helsinki, Helsinki, Finland
DOI
https://doi.org/10.1021/acsomega.3c09147
Journal volume & issue
Vol. 9, no. 10
pp. 11747 – 11754
Abstract
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No abstracts available.
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