The Directory of Open Access Journals
DOAJ Logotype
Open
Global
Trusted
Main actions
Support
Institutions and libraries
Publishers
Institutional and library supporters
Apply
Application form
Guide to applying
The DOAJ Seal
Transparency & best practice
Publisher information
Licensing & copyright
Search
Menu
Secondary actions
Search
Journals
Articles
Documentation
API
OAI-PMH
Widgets
Public data dump
OpenURL
XML
Metadata help
Preservation
About
About DOAJ
DOAJ at 20
DOAJ team
Ambassadors
Advisory Board & Council
Volunteers
News
Support
Institutions and libraries
Publishers
Institutional and library supporters
Apply
Application form
Guide to applying
The DOAJ Seal
Transparency & best practice
Publisher information
Licensing & copyright
Login
Login
Quick search
Close
×
Journals
Articles
Search by keywords:
In the field:
In all fields
Title
ISSN
Subject
Publisher
Country of publisher
Search
ACS Omega
(Feb 2024)
Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films
Elisa Atosuo,
Mikko J. Heikkilä,
Johanna Majlund,
Leevi Pesonen,
Miia Mäntymäki,
Kenichiro Mizohata,
Markku Leskelä,
Mikko Ritala
Affiliations
Elisa Atosuo
Department of Chemistry, University of Helsinki, Helsinki, Finland
Mikko J. Heikkilä
Department of Chemistry, University of Helsinki, Helsinki, Finland
Johanna Majlund
Department of Chemistry, University of Helsinki, Helsinki, Finland
Leevi Pesonen
Department of Chemistry, University of Helsinki, Helsinki, Finland
Miia Mäntymäki
Department of Chemistry, University of Helsinki, Helsinki, Finland
Kenichiro Mizohata
Department of Physics, University of Helsinki, Helsinki, Finland
Markku Leskelä
Department of Chemistry, University of Helsinki, Helsinki, Finland
Mikko Ritala
Department of Chemistry, University of Helsinki, Helsinki, Finland
DOI
https://doi.org/10.1021/acsomega.3c09147
Journal volume & issue
Vol. 9, no. 10
pp. 11747 – 11754
Abstract
Read online
No abstracts available.
WeChat QR code
Close