Фізика і хімія твердого тіла (Jan 2018)
Investigation the Structures ZnO:Al/SiO<sub>x</sub>/PorSi/p-Si/Al
Abstract
Was investigated the luminescent properties of the system ZnO:Al/SiO2/PorSi/Si, which was formed by the method of spray pyrolysis. The shift of the photoluminescence intensity at wavelengths of 350 - 450 nm happen due to the introduction of ZnO in porous silicon, the intensity increases with increasing concentration of aluminum from 1.5 at.% to 4.5 at.%. Keywords: nanotechnology, porous silicon, ZnO, doping.