Nature Communications (Sep 2022)

Integrated wafer-scale ultra-flat graphene by gradient surface energy modulation

  • Xin Gao,
  • Liming Zheng,
  • Fang Luo,
  • Jun Qian,
  • Jingyue Wang,
  • Mingzhi Yan,
  • Wendong Wang,
  • Qinci Wu,
  • Junchuan Tang,
  • Yisen Cao,
  • Congwei Tan,
  • Jilin Tang,
  • Mengjian Zhu,
  • Yani Wang,
  • Yanglizhi Li,
  • Luzhao Sun,
  • Guanghui Gao,
  • Jianbo Yin,
  • Li Lin,
  • Zhongfan Liu,
  • Shiqiao Qin,
  • Hailin Peng

DOI
https://doi.org/10.1038/s41467-022-33135-w
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 9

Abstract

Read online

Defect-free integration of 2D materials onto semiconductor wafers is desired to implement heterogeneous electronic devices. Here, the authors report a method to transfer high-quality graphene on target wafers via gradient surface energy modulation, leading to improved structural and electronic properties.