AIP Advances (Feb 2023)

Origin of extra diffraction spots for high crystalline alpha-Ga2O3

  • Yong-Hee Lee,
  • Duyoung Yang,
  • Byeongjun Gil,
  • Mi-Hyang Sheen,
  • Euijoon Yoon,
  • Yongjo Park,
  • Ho-Won Jang,
  • Sangmoon Yoon,
  • Miyoung Kim,
  • Young-Woon Kim

DOI
https://doi.org/10.1063/5.0136783
Journal volume & issue
Vol. 13, no. 2
pp. 025148 – 025148-6

Abstract

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This work has investigated the microstructure characteristics of high-quality alpha-Ga2O3 thin film grown on the Al2O3 single crystal substrate membrane. Hetero-epitaxial alpha Ga2O3 crystals reveal the formation of a three-fold symmetry at the initial stage of the growth by the oxygen template provided by the Al2O3. Inversion domains are found, and they have a 180° inverted configuration from the surroundings. These IDs lead to extra diffraction spots when observed along [110] and [010].