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Frontiers in Mechanical Engineering
(Mar 2023)
Editorial: Design and analysis of CMOS-MEMS transducers
Anurag Zope,
Sheng-Shian Li,
Sheng-Shian Li
Affiliations
Anurag Zope
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
Sheng-Shian Li
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
Sheng-Shian Li
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
DOI
https://doi.org/10.3389/fmech.2023.1142981
Journal volume & issue
Vol. 9
Abstract
Read online
No abstracts available.
Keywords
CMOS-MEMS
transducer
integration
sensor
actuator
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