Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Hongliang Wang; Xiao Huang; Lijun Yu; Qi Ding; Hanqiang Zhang; Changde He; Wendong Zhang

doi:10.3390/mi12101180

Micromachines (Sep 2021)

Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Hongliang Wang,
Xiao Huang,
Lijun Yu,
Qi Ding,
Hanqiang Zhang,
Changde He,
Wendong Zhang

Affiliations

Hongliang Wang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Xiao Huang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Lijun Yu: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Qi Ding: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Hanqiang Zhang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Changde He: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China
Wendong Zhang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China

DOI: https://doi.org/10.3390/mi12101180
Journal volume & issue: Vol. 12, no. 10
p. 1180

Abstract

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Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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