High Temperature Materials and Processes (Sep 1996)

Formation of Thin Oxide Films by Metal-Organic Chemical Vapour Deposition

  • Haanappel, V.A.C.,
  • van Corbach, H.D.,
  • Hofman, R.,
  • Morssinkhof, R.W.J.,
  • Fransen, T.,
  • Gellings, P.J.

DOI
https://doi.org/10.1515/HTMP.1996.15.4.245
Journal volume & issue
Vol. 15, no. 4
pp. 245 – 262

Abstract

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