Role of annealing temperature on structural and optical properties of MgTiO3 thin films

Abstract

In the present work, the effects of annealing temperature on structural, morphological and optical properties of MgTiO3 (MTO) thin films have been studied. X-ray diffraction (XRD) confirms rhombohedral crystal structure of annealed MTO thin films, whereas the as-deposited films show amorphous nature. Crystallinity of films is observed to improve with annealing temperature. Raman spectra show different vibrational modes in annealed MTO samples. Also, the intensity of Raman peaks is found to increase with annealing temperature. The root-mean-square roughness of films is increased after annealing. Variation in optical bandgap and transmittance of the films is observed after annealing at different temperatures.

Keywords

• MgTiO3 thin films
• RF magnetron sputtering
• Annealing
• Raman spectroscopy
• AFM
• UV–Vis-NIR spectroscopy