Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

Mohammed Awad; Temesgen Bailie Workie; Jingfu Bao; Ken-ya Hashimoto

doi:10.3390/mi14101965

Micromachines (Oct 2023)

Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

Mohammed Awad,
Temesgen Bailie Workie,
Jingfu Bao,
Ken-ya Hashimoto

Affiliations

Mohammed Awad: School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Temesgen Bailie Workie: School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Jingfu Bao: School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Ken-ya Hashimoto: School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China

DOI: https://doi.org/10.3390/mi14101965
Journal volume & issue: Vol. 14, no. 10
p. 1965

Abstract

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This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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