A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

Tao Liu; Zhihao Li; Jiahuan Zhang; Dongxiao Li; Hanjie Dou; Pengfan Wu; Jiaqian Yang; Wangyang Zhang; Xiaojing Mu

doi:10.3390/mi15010045

Micromachines (Dec 2023)

A Gas Flow Measurement System Based on Lead Zirconate Titanate Piezoelectric Micromachined Ultrasonic Transducer

Tao Liu,
Zhihao Li,
Jiahuan Zhang,
Dongxiao Li,
Hanjie Dou,
Pengfan Wu,
Jiaqian Yang,
Wangyang Zhang,
Xiaojing Mu

Affiliations

Tao Liu: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Zhihao Li: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Jiahuan Zhang: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Dongxiao Li: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Hanjie Dou: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Pengfan Wu: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Jiaqian Yang: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Wangyang Zhang: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China
Xiaojing Mu: Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China

DOI: https://doi.org/10.3390/mi15010045
Journal volume & issue: Vol. 15, no. 1
p. 45

Abstract

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Ultrasonic flowmeter is one of the most widely used devices in flow measurement. Traditional bulk piezoelectric ceramic transducers restrict their application to small pipe diameters. In this paper, we propose an ultrasonic gas flowmeter based on a PZT piezoelectric micromachined ultrasonic transducer (PMUT) array. Two PMUT arrays with a resonant frequency of 125 kHz are used as the sensitive elements of the ultrasonic gas flowmeter to realize alternate transmission and reception of ultrasonic signals. The sensor contains 5 × 5 circular elements with a size of 3.7 × 3.7 mm2. An FPGA with a resolution of ns is used to process the received signal, and a flow system with overlapping acoustic paths and flow paths is designed. Compared with traditional measurement methods, the sensitivity is greatly improved. The flow system achieves high-precision measurement of gas flow in a 20 mm pipe diameter. The flow measurement range is 0.5–7 m/s and the relative error of correction is within 4%.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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