Non-isothermal phase-field simulations of laser-written in-plane SiGe heterostructures for photonic applications

Abstract

The design and construction of advanced semiconductor devices relies on the formation of nanostructures with spatially engineered compositions. Here, the authors use phase-field simulations combined with experimental data to understand how to control and utilise phase segregation in SiGe alloys by laser processing for fabrication of in-plane heterostructures.