Micromachines (Apr 2024)

Hybrid Filtering Compensation Algorithm for Suppressing Random Errors in MEMS Arrays

  • Siyuan Liang,
  • Tianyu Guo,
  • Rongrong Chen,
  • Xuguang Li

DOI
https://doi.org/10.3390/mi15050558
Journal volume & issue
Vol. 15, no. 5
p. 558

Abstract

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To solve the high error phenomenon of microelectromechanical systems (MEMS) due to their poor signal-to-noise ratio, this paper proposes an online compensation algorithm wavelet threshold back-propagation neural network (WT-BPNN), based on a neural network and designed to effectively suppress the random error of MEMS arrays. The algorithm denoises MEMS and compensates for the error using a back propagation neural network (BPNN). To verify the feasibility of the proposed algorithm, we deployed it in a ZYNQ-based MEMS array hardware. The experimental results showed that the zero-bias instability, angular random wander, and angular velocity random wander of the gyroscope were improved by about 12 dB, 10 dB, and 7 dB, respectively, compared with the original device in static scenarios, and the dispersion of the output data was reduced by about 8 dB in various dynamic environments, which effectively verified the robustness and feasibility of the algorithm.

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