Solubility Change Behavior of Fluoroalkyl Ether-Tagged Dendritic Hexaphenol under Extreme UV Exposure

• Hyun-Taek Oh,
• Gayoung Kim,
• Seok-Heon Jung,
• Yejin Ku,
• Jin-Kyun Lee,
• Kanghyun Kim,
• Byeong-Gyu Park,
• Sangsul Lee,
• Chawon Koh,
• Tsunehiro Nishi,
• Hyun-Woo Kim

Affiliations

Hyun-Taek Oh

Department of Polymer Science and Engineering, Inha University, Incheon, Republic of Korea

Gayoung Kim

Program in Environmental and Polymer Engineering, Inha University, Incheon, Republic of Korea

Seok-Heon Jung

Department of Polymer Science and Engineering, Inha University, Incheon, Republic of Korea

Yejin Ku

Program in Environmental and Polymer Engineering, Inha University, Incheon, Republic of Korea

Jin-Kyun Lee

Department of Polymer Science and Engineering, Inha University, Incheon, Republic of Korea

Kanghyun Kim

Department of Mechanical Engineering, POSTECH, Pohang, Republic of Korea

Byeong-Gyu Park

Pohang Accelerator Laboratory, POSTECH, Pohang, Republic of Korea

Sangsul Lee

Pohang Accelerator Laboratory, POSTECH, Pohang, Republic of Korea

Chawon Koh

Samsung Electronics Co., Ltd., Semiconductor R&D Center, Suwon, Republic of Korea

Tsunehiro Nishi

Samsung Electronics Co., Ltd., Semiconductor R&D Center, Suwon, Republic of Korea

Hyun-Woo Kim

Samsung Electronics Co., Ltd., Semiconductor R&D Center, Suwon, Republic of Korea