Gas Sensing Properties of MoO3

Abstract

In the present work, we studied the controlled growth of MoO3 nanostructures and their gas sensing performance. MoO3 NS were synthesized using thermal evaporation method. FE-SEM (LEO 1525) and XRD were used to characterize the morphology and crystallinity of MoO3 NS. Sensing devices were mounted on TO packages using electro-soldered gold wires, and they were tested toward some chemical compounds. These NS give reversible response to Acetone, Ethanol and H2 in a temperature range of 300–550 °C. MoO3 sensors exhibit a high response ∆G/G = 45 towards 50 ppm of Ethanol at 450 °C.

Keywords

• molybdenum trioxide
• chemical sensing
• metal oxide