Development of local evacuation system for inhibiting oxidization in atmospheric-pressure plasma jet nitriding

Seiga Chiba; Ryuta Ichiki; Tatsuyuki Nakatani; Takahisa Ueno; Seiji Kanazawa

Results in Physics (Jun 2019)

Development of local evacuation system for inhibiting oxidization in atmospheric-pressure plasma jet nitriding

Seiga Chiba,
Ryuta Ichiki,
Tatsuyuki Nakatani,
Takahisa Ueno,
Seiji Kanazawa

Affiliations

Seiga Chiba: Division of Electrical and Electronic Engineering, Oita University, Oita 870-1192, Japan
Ryuta Ichiki: Division of Electrical and Electronic Engineering, Oita University, Oita 870-1192, Japan; Corresponding author.
Tatsuyuki Nakatani: Research Institute of Technology, Okayama University of Science, Okayama 700-0005, Japan
Takahisa Ueno: Department of Electric and Electronic Enginnering, National Institute of Technology Oita College, Oita 870-0152, Japan
Seiji Kanazawa: Division of Electrical and Electronic Engineering, Oita University, Oita 870-1192, Japan

Journal volume & issue: Vol. 13

Abstract

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To inhibit oxidization during nitriding process using the atmospheric-pressure plasma jet, we developed a local evacuation system. By this system, we perform vacuum purge in the treatment atmosphere locally to reduce residual oxygen. As a result, the oxide layer undesirably formed during nitriding process becomes thinner by vacuum purge. Keywords: Plasma nitriding, Atmospheric-pressure plasma, Oxidation, Vacuum purge

Published in Results in Physics

ISSN: 2211-3797 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Science: Physics
Website: http://www.journals.elsevier.com/results-in-physics/

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