Challenges of an optical pressure standard in medium vacuum measurements

Abstract

Optical pressure standards (OPS) using Fabry-Perot (FP) cavities can measure a wide pressure range with high accuracy. National metrology institute of Japan (NMIJ) is developing an OPS for the pressure range of 1 Pa–100 kPa. In this study, the target uncertainty of the OPS, the challenges for measuring below 100 Pa, and its current specifications in the range from 10 Pa to 120 kPa are reported. In addition, the methods for solving the challenges to achieve the target uncertainty is considered.

Keywords

• Optical pressure standard
• Fabry-Perot cavity
• Vacuum measurement
• Refractometry