Micromachines (Apr 2024)

Lithium Niobate Electro-Optic Modulation Device without an Overlay Layer Based on Bound States in the Continuum

  • Guangyuan Chen,
  • Ning Xue,
  • Zhimei Qi,
  • Weichao Ma,
  • Wangzhe Li,
  • Zhenhu Jin,
  • Jiamin Chen

DOI
https://doi.org/10.3390/mi15040516
Journal volume & issue
Vol. 15, no. 4
p. 516

Abstract

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Electro-optic modulation devices are essential components in the field of integrated optical chips. High-speed, low-loss electro-optic modulation devices represent a key focus for future developments in integrated optical chip technology, and they have seen significant advancements in both commercial and laboratory settings in recent years. Current electro-optic modulation devices typically employ architectures based on thin-film lithium niobate (TFLN), traveling-wave electrodes, and impedance-matching layers, which still suffer from transmission losses and overall design limitations. In this paper, we demonstrate a lithium niobate electro-optic modulation device based on bound states in the continuum, featuring a non-overlay structure. This device exhibits a transmission loss of approximately 1.3 dB/cm, a modulation bandwidth of up to 9.2 GHz, and a minimum half-wave voltage of only 3.3 V.

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