Micromachines (Sep 2020)
Fabrication and Characterization of Curved Compound Eyes Based on Multifocal Microlenses
Abstract
Curved compound eyes have generated great interest owing to the wide field of view but the application of devices is hindered for the lack of proper detectors. One-lens curved compound eyes with multi-focal microlenses provide a solution for wide field imaging integrated in a commercial photo-detector. However, it is still a challenge for manufacturing this kind of compound eye. In this paper, a rapid and accurate method is proposed by a combination of photolithography, hot embossing, soft photolithography, and gas-assisted deformation techniques. Microlens arrays with different focal lengths were firstly obtained on a polymer, and then the planar structure was converted to the curved surface. A total of 581 compound eyes with diameters ranging from 152.8 µm to 240.9 µm were successfully obtained on one curved surface within a few hours, and the field of view of the compound eyes exceeded 108°. To verify the characteristics of the fabricated compound eyes, morphology deviation was measured by a probe profile and a scanning electron microscope. The optical performance and imaging capability were also tested and analyzed. As a result, the ommatidia made up of microlenses showed not only high accuracy in morphology, but also imaging uniformity on a focal plane. This flexible massive fabrication of compound eyes indicates great potential for miniaturized imaging systems.
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