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ACS Omega
(Sep 2024)
Effect of Crystal Rotation on Melt Convection and Resistivity Distribution in 200 mm Floating Zone Silicon Single Crystal Growth
Ding Yan,
Yongtao Wang,
Ruigang Shang,
Guohu Zhang
Affiliations
Ding Yan
GRINM National Engineering Research Center of IC key materials, Beijing, China
Yongtao Wang
GRINM Semiconductor Materials Co., Ltd., Beijing, China
Ruigang Shang
GRINM Semiconductor Materials Co., Ltd., Beijing, China
Guohu Zhang
GRINM Semiconductor Materials Co., Ltd., Beijing, China
DOI
https://doi.org/10.1021/acsomega.4c05573
Journal volume & issue
Vol. 9, no. 40
pp. 41629 – 41635
Abstract
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