Nature Communications (Oct 2017)

Crossing the threshold of ultrafast laser writing in bulk silicon

  • Margaux Chanal,
  • Vladimir Yu. Fedorov,
  • Maxime Chambonneau,
  • Raphaël Clady,
  • Stelios Tzortzakis,
  • David Grojo

DOI
https://doi.org/10.1038/s41467-017-00907-8
Journal volume & issue
Vol. 8, no. 1
pp. 1 – 6

Abstract

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Ultrafast laser processing is a versatile three-dimensional photonic structuring method but it has been limited to wide band gap materials like glasses. Here, Chanal et al. demonstrate direct refractive-index modification in the bulk of silicon by extreme localization of the energy deposition.