Structural and Morphological Investigation of Cr2O3/WO3Oxides Films Composite Using Modified Spray Pyrolysis Technique

Abstract

Cr2O3/WO3 oxides film composite was successfully synthesized via advanced controlled chemical spray pyrolysis deposition technique using two nozzles. Two solutions of tungstic acid and chromium chloride was sprayed separately at various ratios of (W: Cr) at the same time on a silicon substrate at 500 °C, the film then heat-treated at 400 °C for the 60s. The crystal structure, microstructure and morphology properties of prepared films were studied. Based on characterization techniques, crystallized Cr2O3/WO3 mixed oxides films were investigated by X-ray diffraction after the annealing process, with film thickness of about 500 nm. The SEM and AFM revealed that rough and porous microstructures of Cr2O3/WO3 were formed. The obtained microstructure has been known as one of the most effective microstructures due to having high surface area particularly in gas detection applications

Keywords

• cr2o3-wo3
• thin film
• advance spray pyrolysis method
• microstructure characterization