Nanoscale Research Letters (Feb 2018)

Solid-State Nanopore

  • Zhishan Yuan,
  • Chengyong Wang,
  • Xin Yi,
  • Zhonghua Ni,
  • Yunfei Chen,
  • Tie Li

DOI
https://doi.org/10.1186/s11671-018-2463-z
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 10

Abstract

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Abstract Solid-state nanopore has captured the attention of many researchers due to its characteristic of nanoscale. Now, different fabrication methods have been reported, which can be summarized into two broad categories: “top-down” etching technology and “bottom-up” shrinkage technology. Ion track etching method, mask etching method chemical solution etching method, and high-energy particle etching and shrinkage method are exhibited in this report. Besides, we also discussed applications of solid-state nanopore fabrication technology in DNA sequencing, protein detection, and energy conversion.

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