Vapor transport deposition of Sb2Se3 thin films for photodetector application

Sen Wen; Xingtian Yin; Haixia Xie; Yuxiao Guo; Jie Liu; Dan Liu; Wenxiu Que; Huan Liu; Weiguo Liu

doi:10.1142/S2010135X20500162

Journal of Advanced Dielectrics (Aug 2020)

Vapor transport deposition of Sb2Se3 thin films for photodetector application

Sen Wen,
Xingtian Yin,
Haixia Xie,
Yuxiao Guo,
Jie Liu,
Dan Liu,
Wenxiu Que,
Huan Liu,
Weiguo Liu

Affiliations

Sen Wen: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Xingtian Yin: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Haixia Xie: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Yuxiao Guo: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Jie Liu: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Dan Liu: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Wenxiu Que: Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, International Center for Dielectric Research, Shaanxi Engineering Research Center of Advanced Energy Materials and Devices, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, Shaanxi, P. R. China
Huan Liu: Key Laboratory of Thin Film and Optical Manufacturing Technology, Ministry of Education, Xi’an Technological University, Xi’an 710021, Shaanxi, P. R. China
Weiguo Liu: Key Laboratory of Thin Film and Optical Manufacturing Technology, Ministry of Education, Xi’an Technological University, Xi’an 710021, Shaanxi, P. R. China

DOI: https://doi.org/10.1142/S2010135X20500162
Journal volume & issue: Vol. 10, no. 4
pp. 2050016-1 – 2050016-6

Abstract

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Antimony selenide is a promising semiconductor with great application potential in the fields of optoelectronic devices. In this work, the vapor transport deposition (VTD) method is employed to prepare Sb2Se3 films on substrates. The influence of deposition temperature, distance between the Sb2Se3 sources and substrate, and the deposition holding time on the film morphology is investigated in detail. The deposited Sb2Se3 thin film is employed to fabricate photodetector with a structure of ITO/SnO2/Sb2Se3/Au, where the spin-coated SnO2 film is used as the buffer layer. The device demonstrates relative high responsivity in the range of 300–1000nm with a maximum value of 312mA W−1 at 750nm.

Published in Journal of Advanced Dielectrics

ISSN: 2010-135X (Print); 2010-1368 (Online)
Publisher: World Scientific Publishing
Country of publisher: Singapore
LCC subjects: Science: Physics: Electricity and magnetism: Electricity
Website: http://www.worldscientific.com/worldscinet/jad

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