Research Progress of Surface Micro / Nano Structures Preparation Methods and Their Special Properties

Abstract

Constructing surface micro/nano structures and preparing nano-coatings could endow the material surface with special performance. In this work, the special functions of surface micro/nano structures, as well as the main methods and processing technologies for preparing surface micro/nano structures and nano-coatings were mainly reviewed. Firstly, the applications of surface micro/nano structures in superhydrophobicity, optical superlens, friction and wear were introduced. Secondly, the research progress of lithography technology, laser processing technology, self-assembly technology, additive manufacturing technology (3D printing), processing methods of surface micro/nano structures and nano-coatings, such as deposition method and sol-gel method, was described, respectively. Finally, the problems and development trend of different preparation methods of surface micro/nano structures and nano-coatings were summarized.

Keywords

• functional surface|micro/nano structure|nano-coating|laser processing