The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

Xiaoyuan Bai; Yao Shuai; Lu Lv; Ying Xing; Jiaoling Zhao; Wenbo Luo; Chuangui Wu; Tao Yang; Wanli Zhang

doi:10.1063/1.5143550

AIP Advances (Jul 2020)

The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

Xiaoyuan Bai,
Yao Shuai,
Lu Lv,
Ying Xing,
Jiaoling Zhao,
Wenbo Luo,
Chuangui Wu,
Tao Yang,
Wanli Zhang

Affiliations

Xiaoyuan Bai: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Yao Shuai: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Lu Lv: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Ying Xing: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Jiaoling Zhao: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Wenbo Luo: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Chuangui Wu: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Tao Yang: School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Wanli Zhang: State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China

DOI: https://doi.org/10.1063/1.5143550
Journal volume & issue: Vol. 10, no. 7
pp. 075002 – 075002-5

Abstract

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43°Y-cut lithium niobate (LiNbO3, LN) single-crystalline thin films, which are integrated with two types of Bragg reflectors of W/SiO2 and Mo/SiO2, respectively, are fabricated by means of the crystal-ion-slicing technique. Crack-free LN thin films are obtained when the Mo/SiO2 reflector is adopted, while crumples take place when the LN thin film is combined with W/SiO2. Moreover, solidly-mounted-type thin film bulk acoustic wave resonators (LN-SMRs) based on the single-crystalline LN film and Bragg reflector layers of Mo/SiO2 are prepared and characterized. The results indicate that the LN thin film combined with the Mo/SiO2 reflector has good thin film quality, and keff2 of the LN-SMR reaches 20%.

Published in AIP Advances

ISSN: 2158-3226 (Online)
Publisher: AIP Publishing LLC
Country of publisher: United States
LCC subjects: Science: Physics
Website: http://aipadvances.aip.org/

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