A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity

Hongsheng Xu; Hao Jin; Shurong Dong; Jinkai Chen; Xinyu Song; Weipeng Xuan; Lin Shi; Shuyi Huang; Pengjun Zhang; Jikui Luo

doi:10.1063/5.0036554

AIP Advances (Jan 2021)

A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity

Hongsheng Xu,
Hao Jin,
Shurong Dong,
Jinkai Chen,
Xinyu Song,
Weipeng Xuan,
Lin Shi,
Shuyi Huang,
Pengjun Zhang,
Jikui Luo

Affiliations

Hongsheng Xu: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Hao Jin: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Shurong Dong: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Jinkai Chen: Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China
Xinyu Song: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Weipeng Xuan: Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China
Lin Shi: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Shuyi Huang: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China
Pengjun Zhang: College of Life Sciences, China Jiliang University, Hangzhou 310018, China
Jikui Luo: Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China

DOI: https://doi.org/10.1063/5.0036554
Journal volume & issue: Vol. 11, no. 1
pp. 015143 – 015143-7

Abstract

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Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δfm21) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments.

Published in AIP Advances

ISSN: 2158-3226 (Online)
Publisher: AIP Publishing LLC
Country of publisher: United States
LCC subjects: Science: Physics
Website: http://aipadvances.aip.org/

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