Water-Immersible MEMS Mirror with a Large Optical Aperture

Yi Yang; Yichen Liu; Yongquan Su; Yang Wang; Yonggui Zhang; Hao Chen; Lihao Wang; Zhenyu Wu

doi:10.3390/mi15020235

Micromachines (Feb 2024)

Water-Immersible MEMS Mirror with a Large Optical Aperture

Yi Yang,
Yichen Liu,
Yongquan Su,
Yang Wang,
Yonggui Zhang,
Hao Chen,
Lihao Wang,
Zhenyu Wu

Affiliations

Yi Yang: School of Microelectronics, Shanghai University, Shanghai 200444, China
Yichen Liu: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Yongquan Su: School of Microelectronics, Shanghai University, Shanghai 200444, China
Yang Wang: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Yonggui Zhang: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Hao Chen: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Lihao Wang: State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Zhenyu Wu: School of Microelectronics, Shanghai University, Shanghai 200444, China

DOI: https://doi.org/10.3390/mi15020235
Journal volume & issue: Vol. 15, no. 2
p. 235

Abstract

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This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 Hz in water. The scanning angle reaches ±5° and ±2° at resonant frequencies in air and water, respectively. The cavitation phenomenon is observed when the device is operating in water, which leads the device to electrical failure. To address this issue, a device with reduced resonant frequencies—246 Hz and 152 Hz in air and water—is characterized, through which the bubbles can be effectively prohibited. This MEMS mirror could potentially be used in ultrasound and photoacoustic microscopy applications.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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