Flexible thin film thermocouples: From structure, material, fabrication to application

Zhongkai Zhang; Zhaojun Liu; Jiaming Lei; Luntao Chen; Le Li; Na Zhao; Xudong Fang; Yong Ruan; Bian Tian; Libo Zhao

iScience (Aug 2023)

Flexible thin film thermocouples: From structure, material, fabrication to application

Zhongkai Zhang,
Zhaojun Liu,
Jiaming Lei,
Luntao Chen,
Le Li,
Na Zhao,
Xudong Fang,
Yong Ruan,
Bian Tian,
Libo Zhao

Affiliations

Zhongkai Zhang: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Zhaojun Liu: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore; Corresponding author
Jiaming Lei: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Luntao Chen: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Le Li: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Na Zhao: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Xudong Fang: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an 710049, China
Yong Ruan: State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
Bian Tian: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China
Libo Zhao: State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an 710049, China; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai 265503, China

Journal volume & issue: Vol. 26, no. 8
p. 107303

Abstract

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Summary: Flexible thin-film thermocouples (TFTCs) have been garnering interest as temperature sensors due to the advantages of being flexible, ultrathin, and ultralight. Additionally, they have fast response times and enable detection of temperature. These properties have made them suitable for applications such as wearable electronics, healthcare, portable personal devices, and smart detection systems. This review presents the progress in the development of flexible TFTCs. The mechanism, structural design, materials, fabrication methods, and related applications of flexible TFTCs are also elaborated. Finally, future development directions of flexible TFTCs are discussed such as wide-range temperature measurement, multiple sensor integration, and achieving reliable cold-end compensation systems.

Published in iScience

ISSN: 2589-0042 (Online)
Publisher: Elsevier
Country of publisher: United States
LCC subjects: Science
Website: http://www.cell.com/iscience/home

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