Substantial lifetime enhancement for Si-based photoanodes enabled by amorphous TiO2 coating with improved stoichiometry

Abstract

Residual Cl ligands are found critical to the stability of amorphous TiO2 coatings by atomic layer deposition. Here, in-situ water treatment is developed to remove residual Cl, while preserve its uniform amorphous phase, which improves the lifetime of Si photoanode to 600 h for hydrogen production.