Design and Considerations: Microelectromechanical System (MEMS) Vibrating Ring Resonator Gyroscopes

Abstract

Microelectromechanical system (MEMS) vibrating gyroscope design considerations are always intriguing due to their microscale mechanical, electrical, and material behavior. MEMS vibrating ring gyroscopes have become important inertial sensors in inertial measurement units (IMU) for navigation and sensing applications. The design of a MEMS vibrating ring gyroscope incorporates an oscillating ring structure as a proof mass, reflecting unique design challenges and possibilities. This paper presents a comprehensive design analysis of the MEMS vibrating ring gyroscope from the mechanical, electrical, and damping perspectives. The mechanical design of the MEMS vibrating ring gyroscope investigates the various frame designs of the vibrating ring structure, as well as the various beam structures, including rectangular and semicircular beam structures, which are analyzed using mathematical models and finite element analysis (FEA) simulations that provide an in-depth analysis of the stiffness and deflection of the vibrating structures. The electrical designs of the MEMS vibrating ring gyroscope are analyzed using various electrode configurations, electrostatic actuation, and capacitive detection mechanisms. The design analysis of various forms of damping, including viscous, structural, thermoelastic, and anchor damping, is discussed. The variety of design structures is investigated for MEMS vibrating ring gyroscopes’ mechanical, electrical, and damping performance.

Keywords

• MEMS
• MEMS gyroscope
• vibrating ring gyroscope
• ring resonator
• inertial sensors
• IMU