Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization

• Zhaohan Li,
• Parker R. Wray,
• Magel P. Su,
• Qiaomiao Tu,
• Himashi P. Andaraarachchi,
• Yong Jin Jeong,
• Harry A. Atwater,
• Uwe R. Kortshagen

Affiliations

Zhaohan Li

Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, United States

Parker R. Wray

Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, Pasadena, California, United States

Magel P. Su

Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, Pasadena, California, United States

Qiaomiao Tu

Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, United States

Himashi P. Andaraarachchi

Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, United States

Yong Jin Jeong

Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, United States

Harry A. Atwater

Thomas J. Watson Laboratories of Applied Physics, California Institute of Technology, Pasadena, California, United States

Uwe R. Kortshagen

Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota, United States