Nanomaterials (Jul 2020)

Reusable TiN Substrate for Surface Plasmon Resonance Heterodyne Phase Interrogation Sensor

  • Ru-Jing Sun,
  • Hung Ji Huang,
  • Chien-Nan Hsiao,
  • Yu-Wei Lin,
  • Bo-Huei Liao,
  • Yuan-Fong Chou Chau,
  • Hai-Pang Chiang

DOI
https://doi.org/10.3390/nano10071325
Journal volume & issue
Vol. 10, no. 7
p. 1325

Abstract

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A TiN-based substrate with high reusability presented high-sensitivity refractive index measurements in a home-built surface plasmon resonance (SPR) heterodyne phase interrogation system. TiN layers with and without additional inclined-deposited TiN (i-TiN) layers on glass substrates reached high bulk charge carrier densities of 1.28 × 1022 and 1.91 × 1022 cm−3, respectively. The additional 1.4 nm i-TiN layer of the nanorod array presented a detection limit of 6.1 × 10−7 RIU and was higher than that of the 46 nm TiN layer at 1.2 × 10−6 RIU when measuring the refractive index of a glucose solution. Furthermore, the long-term durability of the TiN-based substrate demonstrated by multiple processing experiments presented a high potential for various practical sensing applications.

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