A Double Layer Sensing Electrode “BaTi(1-X)RhxO3/Al-Doped TiO2” for NO2 Detection above 600 °C

Abstract

NO2 emission is mostly related to combustion processes, where gas temperatures exceed far beyond 500 °C. The detection of NO2 in combustion and exhaust gases at elevated temperatures requires sensors with high NO2 selectivity. The thermodynamic equilibrium for NO2/NO ≥ 500 °C lies on the NO side. High temperature stability of TiO2 makes it a promising material for elevated temperature towards CO, H2, and NO2. The doping of TiO2 with Al3+ (Al:TiO2) increases the sensitivity and selectivity of sensors to NO2 and results in a relatively low cross-sensitivity towards CO. The results indicate that NO2 exposure results in a resistance decrease of the sensors with the single Al:TiO2 layers at 600 °C, with a resistance increase at 800 °C. This alteration in the sensor response in the temperature range of 600 °C and 800 °C may be due to the mentioned thermodynamic equilibrium changes between NO and NO2. This work investigates the NO2-sensing behavior of duplex layers consisting of Al:TiO2 and BaTi(1-x)RhxO3 catalysts in the temperature range of 600 °C and 900 °C. Al:TiO2 layers were deposited by reactive magnetron sputtering on interdigitated sensor platforms, while a catalytic layer, which was synthesized by wet chemistry in the form of BaTi(1-x)RhxO3 powders, were screen-printed as thick layers on the Al:TiO2-layers. The use of Rh-incorporated BaTiO3 perovskite (BaTi(1-x)RhxO3) as a catalytic filter stabilizes the sensor response of Al-doped TiO2 layers yielding more reliable sensor signal throughout the temperature range.

Keywords

• TiO2
• Al-doping
• NO2 sensor
• BaTi(1-x)RhxO3 catalytic filter
• sputtering
• screen printing